100 Steps/Second Ultra-High Speed Board Pattern Inspection System
The 1116 Series are high-speed substrate testers that use capacitance testing to greatly reduce the number of testing steps and time required compared to the continuity testing method. They support ordinary bare boards to high-density BGA, CSP, or MCM packages, as well as flexible boards.
1116-71 (Offline type)
1116-72 (Single-robot transport)
1116-73 (Offline, with 1945-21 and 1945-22)
1116-74 (Single-robot transport, with 1945-21 and 1945-22)
1116-75 (Double-robot transport, with 1945-21 and 1945-22)
*1945-21: Coaxial Downward Illumination Unit for R arm
*1945-22: Coaxial Downward Illumination Unit for L arm
Testable board dimensions:
50 × 50 to 610 × 510 mm (*1116-75: to 280 × 510 mm)
• High-speed pattern testing using the capacitance measurement method, which requires dramatically fewer test steps than continuity testing
• Super-high-speed testing at up to 100 steps/sec.
• High resolution of 5 aF to ensure reliable detection of minute changes in capacitance caused by defects (1 aF = 10-6 pF)
• Fixtureless design for extremely low running costs
• High-speed soft landing function that minimizes probe impact marks
• Support for boards ranging from standard bare boards to flexible boards, BGAs, CSPs, MCMs, and other high-density boards
• Reliable probing of fine-pitch minute pads thanks to a minimum pad diameter of 20 μm
• Suction-type transport that eliminates dead space during testing
• Support for resistance, inductance, diode, and voltage measurement in addition to capacitance measurement
■ Specifications overview
1116-71, 1116-73 | 1116-72, 1116-74 | |
Number of arms | 2 | |
Number of test steps | Max. 40,000 (during continuous testing, 300,000) | |
Measurement time | Max. 120 points/sec. (0.1 mm movements, simultaneous probing with 2 arms, capacitance measurement) | |
Minimum pad diameter | φ 20 μm | |
Probe working area | 610 mm (24.02 in) W × 510 mm (20.08 in) D | |
Clampable/transportable board dimensions | Thickness: 0.1 mm to 3.2 mm (0.13 in) Outer dimensions: 50 mm (1.97 in) W × 50 mm (1.97 in) D to 610 mm (24.02 in) × 510 mm (20.08 in) D |
|
Power supply | 200 V AC ±10% (single-phase), 50/60 Hz, 3 kVA | |
Dimensions and mass | 1,465 mm (57.68 in) W × 1,230 mm (48.43 in) H × 1,100 mm (43.31 in) D, 1,000 kg (35,273.4 oz) | 2,075 mm (81.69 in) W × 1,230 mm (48.43 in) H × 1,100 mm (43.31 in) D, 1,000 kg (35,273.4 oz) |